E/M제품군

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고순도 염소

Grade 3.0N 5.0N 5.5N
Purity(%) 99.9 99.999 99.9995 Metals
H2 ≤ 0.1 ppmv Al ≤ 5.0 ppbw Ni ≤ 10.0 ppbw
O2(+Ar) ≤ 1.0 ppmv ≤ 1.0 ppmv Cd ≤ 1.0 ppbw K ≤ 2.0 ppbw
N2 ≤ 2.0 ppmv ≤ 1.0 ppmv Ca ≤ 5.0 ppbw Na ≤ 2.0 ppbw
CH4 ≤ 0.5 ppmv ≤ 0.25 ppmv Cr ≤ 5.0 ppbw Zn ≤ 3.0 ppbw
CO ≤ 1.0 ppmv ≤ 0.25 ppmv Cu ≤ 5.0 ppbw Pb ≤ 1.0 ppbw
CO2 ≤ 2.0 ppmv ≤ 0.5 ppmv Fe ≤ 10.0 ppbw P ≤ 5.0 ppbw
H2O ≤ 1.0 ppmv ≤ 0.75 ppmv Mg ≤ 5.0 ppbw Co ≤ 10.0 ppbw
Mn ≤ 5.0 ppbw Total ≤ 300 ppbw
Package Inner Volume Contents Pressure Material
44L ~ 47L 47 Liter 50 kg 85.3 psig @ 21C & 1atm Carbon Steel
440L 440 Liter 500 kg 85.3 psig @ 21C & 1atm Carbon Steel
Valve type CGA660/DISS728/JIS26-14R
Shipped as Liquefied Gas
PRODUCTS

고순도 염화수소

Grade 3.0N 4.5N 5.0N
Purity(%) 99.9 99.995 99.999 Metals
H2 ≤ 5.0 ppmv Al ≤ 1.0 ppbw Sb ≤ 1.0 ppbw
O2(+Ar) ≤ 300 ppmv ≤ 2.0 ppmv ≤ 1.0 ppmv Cr ≤ 1.0 ppbw Pb ≤ 1.0 ppbw
N2 ≤ 600 ppmv ≤ 4.0 ppmv ≤ 1.0 ppmv Ni ≤ 2.0 ppbw Bi ≤ 1.0 ppbw
CH4 ≤ 5 ppmv ≤ 0.5 ppmv ≤ 0.1 ppmv Cu ≤ 1.0 ppbw Na ≤ 1.0 ppbw
CO ≤ 5 ppmv ≤ 1.0 ppmv ≤ 0.5 ppmv Zn ≤ 1.0 ppbw Fe ≤ 3.0 ppbw
CO2 ≤ 50 ppmv ≤ 2.0 ppmv ≤ 1.0 ppmv As ≤ 1.0 ppbw
H2O ≤ 5 ppmv ≤ 3.0 ppmv ≤ 0.75 ppmv Cd ≤ 1.0 ppbw
Package Inner Volume Contents Pressure Material
47L 47 Liter 25 kg 613 psig @ 21C & 1atm Carbon Steel
T-Drum 900 Liter 500 kg 613 psig @ 21C & 1atm Carbon Steel
Valve type CGA330/DISS634/JIS26-14R
Shipped as Liquefied Gas

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